Thickness measurement of photoresist on water by surface measuring instrument.
نویسندگان
چکیده
منابع مشابه
Thickness Measurement of Photoresist Thin Films Using Interferometry
Photoresists are polymers sensitive to light, usually in the ultraviolet (UV) range of the electromagnetic radiation spectrum. They are classified into positive and negative. In positive types, the exposed to light region of the photoresist becomes solvable to a developer, while the unexposed one remains unsolvable. In negative types the opposite happens. Photoresists are widely used in micro a...
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ژورنال
عنوان ژورنال: Journal of the Surface Finishing Society of Japan
سال: 1989
ISSN: 0915-1869,1884-3409
DOI: 10.4139/sfj.40.241